发明授权
- 专利标题: Nonvolatile semiconductor device and method of manufacturing same
- 专利标题(中): 非易失性半导体器件及其制造方法
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申请号: US911002申请日: 1997-08-14
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公开(公告)号: US5838611A公开(公告)日: 1998-11-17
- 发明人: Kohji Kanamori
- 申请人: Kohji Kanamori
- 申请人地址: JPX Tokyo
- 专利权人: NEC Corporation
- 当前专利权人: NEC Corporation
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX8-215634 19960815
- 主分类号: G11C16/04
- IPC分类号: G11C16/04 ; H01L21/8247 ; H01L27/115 ; H01L29/788 ; H01L29/792 ; G11C11/34
摘要:
A semiconductor memory device with a contactless array structure has bit-lines formed in a semiconductor substrate by diffusion of an impurity. Word-lines (control gates) are formed on the substrate so as to intersect the bit-lines. Floating gates are disposed in intersecting regions between the bit- and word-lines. Regions of higher resistance extend in parallel to the bit-lines located on both sides of a floating gates and located in an offset manner relative to the floating gate. A thick dielectric film is formed between the regions of higher resistance and word-lines. In this semiconductor memory device, a source side injection method with higher efficiency can be utilized for electron injection to a floating gate (programming) and thereby a lower programming voltage, less power consumption, and higher degree of integration are achieved.
公开/授权文献
- US5272483A Navigation system 公开/授权日:1993-12-21
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