- 专利标题: Inspection data analyzing system
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申请号: US908550申请日: 1992-06-30
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公开(公告)号: US5841893A公开(公告)日: 1998-11-24
- 发明人: Seiji Ishikawa , Masao Sakata , Jun Nakazato , Sadao Shimoyashiro , Hiroto Nagatomo , Yuzo Taniguchi , Osamu Satou , Tsutomu Okabe , Yuzaburo Sakamoto , Kimio Muramatsu , Kazuhiko Matsuoka , Taizo Hashimoto , Yuichi Ohyama , Yutaka Ebara , Isao Miyazaki , Shuichi Hanashima
- 申请人: Seiji Ishikawa , Masao Sakata , Jun Nakazato , Sadao Shimoyashiro , Hiroto Nagatomo , Yuzo Taniguchi , Osamu Satou , Tsutomu Okabe , Yuzaburo Sakamoto , Kimio Muramatsu , Kazuhiko Matsuoka , Taizo Hashimoto , Yuichi Ohyama , Yutaka Ebara , Isao Miyazaki , Shuichi Hanashima
- 申请人地址: JPX Tokyo
- 专利权人: Hitachi, Ltd.
- 当前专利权人: Hitachi, Ltd.
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX1-177934 19890712
- 主分类号: H01L21/66
- IPC分类号: H01L21/66 ; G01N21/88 ; G01N21/956 ; G06K9/00
摘要:
The present invention provides data analysis stations respectively for a probing tester and an automatic particle inspection machine. And, in the data analysis station, the coordinates on which the disposition of the chips are described on a product basis are equal to those on which the locations of the defects are described. Further, the station provides a function of determining which of the chips each defect belongs to. These data analysis stations are connected through a communication line. The present invention is capable of analyzing the data on a chip basis, resulting in being able to grasp the relation between how the defects are caused on each chip and the product character of the chip.
公开/授权文献
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