发明授权
- 专利标题: Angular velocity sensor
- 专利标题(中): 角速度传感器
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申请号: US836482申请日: 1997-05-07
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公开(公告)号: US5854427A公开(公告)日: 1998-12-29
- 发明人: Jiro Terada , Hiroshi Senda , Masami Tamura , Masaharu Ushihara , Masakazu Hatanaka
- 申请人: Jiro Terada , Hiroshi Senda , Masami Tamura , Masaharu Ushihara , Masakazu Hatanaka
- 申请人地址: JPX Osaka
- 专利权人: Matsushita Electric Industrical Co., Ltd.
- 当前专利权人: Matsushita Electric Industrical Co., Ltd.
- 当前专利权人地址: JPX Osaka
- 优先权: JPX7-230885 19950908; JPX7-330002 19951219
- 主分类号: G01C19/56
- IPC分类号: G01C19/56 ; G01P9/04
摘要:
The present invention is related to an angular velocity sensor, and intends to improve the detection characteristic through a precise measuring of an angular velocity signal. For this objective, the invented angular velocity sensor comprises U-shape first and second piezoelectric elements(4),(5) bonded together sandwiching a detection electrode(6), wherein in at least one of the tuning fork arms(4a),(5a) the first and second piezoelectric elements(4),(5) are polarized in a direction of thickness along which the piezoelectric elements are bonded together. Driving electrodes(7),(12) and (8),(11) provided in diagonal arrangement on the tuning fork arm are supplied with driving signals inverse-phased to each other. In such a structure, the driving signals cancel to each other at the vicinity of detection electrode; as a result, the driving signals never mix with a detection signal to be detected by the detection electrode(6). Thus, the capability of detecting an angular velocity signal is improved.
公开/授权文献
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