发明授权
- 专利标题： Electron beam emitting tungsten filament
- 专利标题（中）： 电子束发射钨丝
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申请号： US912199申请日： 1997-08-18
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公开(公告)号： US5864199A公开(公告)日： 1999-01-26
- 发明人: Roger L. Alvis , Janice Gray , Bryan Tracy
- 申请人： Roger L. Alvis , Janice Gray , Bryan Tracy
- 申请人地址： CA Sunnyvale
- 专利权人： Advanced Micro Devices, Inc.
- 当前专利权人： Advanced Micro Devices, Inc.
- 当前专利权人地址： CA Sunnyvale
- 主分类号： H01J1/304
- IPC分类号： H01J1/304 ; H01J9/02 ; H01J27/00
摘要：
Electron beam emitting filaments having a tip with a radius of curvature less than about 50 .ANG. are produced using focused ion beam milling. In one embodiment, platinum is deposited on a tungsten loop electron beam filament and sharpened using focused ion beam milling to a radius of curvature less than about 50 .ANG..
公开/授权文献
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