发明授权
- 专利标题: Discharge arrangement for pulsed gas lasers
- 专利标题(中): 脉冲气体激光器的放电装置
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申请号: US776116申请日: 1997-01-22
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公开(公告)号: US5875207A公开(公告)日: 1999-02-23
- 发明人: Rustem Osmanow
- 申请人: Rustem Osmanow
- 申请人地址: DEX Berlin
- 专利权人: ATL Lasertechnik & Accessories GmbH
- 当前专利权人: ATL Lasertechnik & Accessories GmbH
- 当前专利权人地址: DEX Berlin
- 优先权: DEX4426723.1 19940722
- 主分类号: H01S3/038
- IPC分类号: H01S3/038 ; H01S3/0971 ; H01S3/097
摘要:
The description relates to a discharge device (1) for pulsed gas lasers in which there are laser electrodes (8, 9) in the space (15) between which discharges with intense UV emission are produced by an arrangement on at least one side, by which the space (15) between the laser electrodes (8, 9) is pre-ionized. Essentially in the invention, the arrangement (2, 3, 4) includes at least one rod electrode (2) which is surrounded by an insulating, preferably ceramic, material (4) and has a conductive contact (5) with the surface (6) of the insulating ceramic material (4), and on this surface (6) there is at least one counter-electrode (7) spaced from the rod electrode (2), the counter-electrode (7) being conductively connected to one of the laser electrodes (8), so that sliding discharge tracks or paths (13) are formed between the at least one rod electrode (2) and the counter-electrode (7). This provides a discharge device (1) making the laser beam generation markedly more effective and lengthening the useful life of the components and gas filling of the laser.
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