发明授权
US5877514A Liquid crystal display device integrated with driving circuit and method for fabricating the same 失效
与驱动电路集成的液晶显示装置及其制造方法

  • 专利标题: Liquid crystal display device integrated with driving circuit and method for fabricating the same
  • 专利标题(中): 与驱动电路集成的液晶显示装置及其制造方法
  • 申请号: US853567
    申请日: 1997-05-09
  • 公开(公告)号: US5877514A
    公开(公告)日: 1999-03-02
  • 发明人: Seong Moh Seo
  • 申请人: Seong Moh Seo
  • 申请人地址: KRX Seoul
  • 专利权人: LG Electronics, Inc.
  • 当前专利权人: LG Electronics, Inc.
  • 当前专利权人地址: KRX Seoul
  • 优先权: KRX1996/15700 19960511
  • 主分类号: H01L21/77
  • IPC分类号: H01L21/77 H01L21/84 H01L27/12 H01L29/04 H01L31/036
Liquid crystal display device integrated with driving circuit and method
for fabricating the same
摘要:
Provided is a method for fabricating a liquid crystal display device integrated with a driver circuit on a substrate, a surface of the substrate being divided into a P-channel region, an N-channel region, and a pixel region. The method includes the steps of forming a gate electrode on each of the P-channel, N-channel, and pixel regions of the substrate; forming a gate insulating layer on the entire surface of the substrate including the gate electrodes; forming a first transparent electrode layer over the gate insulating layer; forming a conductive layer over the first transparent electrode layer; forming a second transparent electrode layer over the conductive layer; removing portions of the first transparent electrode layer, the conductive layer, and the second transparent electrode layer to form source/drain electrodes adjacent the gate electrodes in each of the P-channel, N-channel, and pixel regions of the substrate; doping first impurities into the second transparent electrode layer in the P-channel region; doping second impurities into the second transparent electrode layer in the N-channel region and in the pixel region; forming a semiconductor layer over the entire surface of the substrate; annealing the semiconductor layer; forming a passivation layer over the entire surface of the substrate; and removing portions of the passivation layer, the second transparent electrode, and the conductive layer in the pixel region to expose a portion of the first transparent electrode layer.
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