Invention Grant
- Patent Title: Gas source and dispensing system with in situ monitoring of pressure and temperature
- Patent Title (中): 气源和分配系统,用于现场监测压力和温度
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Application No.: US858631Application Date: 1997-05-20
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Publication No.: US5882384APublication Date: 1999-03-16
- Inventor: Glenn M. Tom , James V. McManus
- Applicant: Glenn M. Tom , James V. McManus
- Applicant Address: CT Danbury
- Assignee: Advanced Technology Materials, Inc.
- Current Assignee: Advanced Technology Materials, Inc.
- Current Assignee Address: CT Danbury
- Main IPC: B01D53/04
- IPC: B01D53/04
Abstract:
A fluid storage and dispensing system including a fluid storage and dispensing vessel containing a physical adsorbent material having sorptive affinity for the fluid to be stored in the vessel and subsequently dispensed from the vessel through a valve head assembly. The character of the fluid stored in the vessel, such as its pressure and/or temperature, is non-invasively monitored during the storage (non-dispensing) mode of the system, by a sensing element in the valve head assembly operative coupled with an output device such as a visual output display or a set point-limited alarm.
Public/Granted literature
- US5223913A Spectrophotometer Public/Granted day:1993-06-29
Information query
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