发明授权
- 专利标题: Crystal pulling method
- 专利标题(中): 水晶拉法
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申请号: US944869申请日: 1997-10-06
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公开(公告)号: US5882397A公开(公告)日: 1999-03-16
- 发明人: Eiichi Iino , Makoto Iida , Masahiko Urano , Masanori Kimura , Shozo Muraoka
- 申请人: Eiichi Iino , Makoto Iida , Masahiko Urano , Masanori Kimura , Shozo Muraoka
- 申请人地址: JPX Tokyo
- 专利权人: Shin Etsu Handotai Co., Ltd.
- 当前专利权人: Shin Etsu Handotai Co., Ltd.
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX8-297457 19961018
- 主分类号: C30B15/32
- IPC分类号: C30B15/32 ; C30B15/30 ; C30B29/06 ; H01L21/208
摘要:
In a crystal pulling method in which a growing single crystal is initially pulled by a seed chuck and subsequently pulled by lifting jig in the middle of the pulling operation, the speed Va of the seed chuck relative to the lifting jig is decreased, while the rising speed Vb of the lifting jig increases, from a first point where switching of the pulling mechanism from the seed chuck to the lifting jig is started. The total speed Vt=Vb+Va is constantly maintained at a desired pulling speed V up to a third point where the shifting of the load from the seed chuck to the lifting jig is started. Subsequently, the total speed Vt is made less than the desired pulling speed V from the third point where the shifting of the load from the seed shuck to the lifting jig is started. This enables accurate growth of a crystal.
公开/授权文献
- US5307912A Slip clutch 公开/授权日:1994-05-03
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