A method of manufacturing an optical information recording medium comprising the steps of: forming a plurality of component thin films on a substrate or on a sample at a predetermined film-forming speed and within a predetermined film-forming time in sequence; measuring spectral reflectance of the multilayer thin film formed on the substrate or on the sample; comparing the measured value of the spectral reflectance and the standard value of the spectral reflectance to detect the difference between them; compensating at least one of the film-forming speed and the film-forming time based on the detected difference; and forming a plurality of thin films based on the compensated film-forming speed and with the compensated film-forming time. Consequently, a thickness of each component thin film of the optical information recording medium can be measured easily and production loss in measuring a film-forming speed can be decreased.