发明授权
- 专利标题: Process for depositing a carbon-rich coating on a moving substrate
- 专利标题(中): 在运动基板上沉积富碳涂层的方法
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申请号: US744227申请日: 1996-11-05
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公开(公告)号: US5888594A公开(公告)日: 1999-03-30
- 发明人: Moses M. David , Donald J. McClure , Stephen P. Maki
- 申请人: Moses M. David , Donald J. McClure , Stephen P. Maki
- 申请人地址: MN St. Paul
- 专利权人: Minnesota Mining and Manufacturing Company
- 当前专利权人: Minnesota Mining and Manufacturing Company
- 当前专利权人地址: MN St. Paul
- 主分类号: C23C16/26
- IPC分类号: C23C16/26 ; C23C16/54 ; B05D3/06 ; C23C16/50
摘要:
A process and apparatus for deposition of a carbon-rich coating onto a moving substrate is provided. The process and apparatus involve the creation of an electric field surrounding a rotatable electrode in a carbon-containing gaseous environment. This results in carbon-rich plasma formation, wherein the electrode is negatively biased with respect to the electrode which results in ion acceleration from the plasma toward the electrode. Ion bombardment continuously occurs on a substrate in contact with the electrode producing a continuous carbon-rich coating over the length of the substrate.
公开/授权文献
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