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US5888594A Process for depositing a carbon-rich coating on a moving substrate 失效
在运动基板上沉积富碳涂层的方法

Process for depositing a carbon-rich coating on a moving substrate
摘要:
A process and apparatus for deposition of a carbon-rich coating onto a moving substrate is provided. The process and apparatus involve the creation of an electric field surrounding a rotatable electrode in a carbon-containing gaseous environment. This results in carbon-rich plasma formation, wherein the electrode is negatively biased with respect to the electrode which results in ion acceleration from the plasma toward the electrode. Ion bombardment continuously occurs on a substrate in contact with the electrode producing a continuous carbon-rich coating over the length of the substrate.
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