发明授权
- 专利标题： Angular velocity sensor having cantilever beams
- 专利标题（中）： 具有悬臂梁的角速度传感器
-
申请号： US461762申请日： 1995-06-05
-
公开(公告)号： US5889208A公开(公告)日： 1999-03-30
- 发明人: Hiroyasu Nose
- 申请人： Hiroyasu Nose
- 申请人地址： JPX Tokyo
- 专利权人： Canon Kabushiki Kaisha
- 当前专利权人： Canon Kabushiki Kaisha
- 当前专利权人地址： JPX Tokyo
- 优先权： JPX3-349152 19911206
- 主分类号： G01C19/5656
- IPC分类号： G01C19/5656 ; G01P9/04
摘要：
An angular velocity sensor comprises a substrate, a vibrating member of an elongate plate formed by processing a part of the substrate, a support beam formed by processing a part of the substrate to support a center of the vibrating member in a longitudinal direction thereof, a driving device for driving both longitudinal ends of the vibrating member to vibrate in a first direction, and a detecting device for detecting vibrations of the vibrating member in a second direction perpendicular to the first direction thereby to detect an angular velocity of rotation of the substrate.
信息查询
