发明授权
- 专利标题： Sealable, transportable container adapted for horizontal loading and unloading
- 专利标题（中）： 可密封的，可运输的容器适用于水平装卸
-
申请号： US518517申请日： 1995-08-23
-
公开(公告)号： US5895191A公开(公告)日： 1999-04-20
- 发明人: Anthony C. Bonora , William J. Fosnight
- 申请人： Anthony C. Bonora , William J. Fosnight
- 申请人地址： CA Fremont
- 专利权人： Asyst Technologies
- 当前专利权人： Asyst Technologies
- 当前专利权人地址： CA Fremont
- 主分类号： H01L21/673
- IPC分类号： H01L21/673 ; H01L21/677 ; B65G49/07
摘要：
A transportable container for storing and carrying articles such as semiconductor wafers or flat panel display substrates which is adapted for horizontal loading and unloading. The container includes a box and a box door. The box door can be sealably attached to the box to isolate the interior of the box from ambient atmospheric conditions. The container is adapted to mate with a port of a canopy which encloses a semiconductor processing apparatus.
信息查询
IPC分类:
