发明授权
US5896294A Method and apparatus for inspecting manufactured products for defects in
response to in-situ monitoring
失效
用于检查制造产品的方法和装置，以响应原位监测的缺陷
- 专利标题： Method and apparatus for inspecting manufactured products for defects in response to in-situ monitoring
- 专利标题（中）： 用于检查制造产品的方法和装置，以响应原位监测的缺陷
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申请号： US815353申请日： 1997-03-11
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公开(公告)号： US5896294A公开(公告)日： 1999-04-20
- 发明人: Wanyee Apple Chow , Ming C. Chen , Yung-Tao Lin , Ying Shiau
- 申请人： Wanyee Apple Chow , Ming C. Chen , Yung-Tao Lin , Ying Shiau
- 申请人地址： CA Sunnyvale
- 专利权人： Advanced Micro Devices, Inc.
- 当前专利权人： Advanced Micro Devices, Inc.
- 当前专利权人地址： CA Sunnyvale
- 主分类号： G05B19/418
- IPC分类号： G05B19/418 ; G06F19/00 ; G06G7/64 ; G06G7/66
摘要：
An apparatus and method for selecting products to inspect for defects performs in-situ monitoring of a processing tool during a manufacturing processing step. The data from the in-situ monitoring for a test run of products is correlated by a neural network with data collected during inspection of the test products for defects. During a production run of products, the in-situ monitor data is provided to the neural network which, based on the input data and the correlation, predicts the values of the data that would be collected upon inspection of the products. Specific products from the production run are selected for inspection based upon the predicted values.
公开/授权文献
- USD346101S Spanner wrench 公开/授权日：1994-04-19
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