发明授权
- 专利标题: Field emission type cold cathode apparatus and method of manufacturing the same
- 专利标题(中): 场致发射型冷阴极装置及其制造方法
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申请号: US788695申请日: 1997-01-24
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公开(公告)号: US5898258A公开(公告)日: 1999-04-27
- 发明人: Tadashi Sakai , Tomio Ono , Li Zhang
- 申请人: Tadashi Sakai , Tomio Ono , Li Zhang
- 申请人地址: JPX Kawasaki
- 专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人地址: JPX Kawasaki
- 优先权: JPX8-011033 19960125
- 主分类号: H01J1/304
- IPC分类号: H01J1/304 ; H01J9/02 ; H01J1/30
摘要:
A field emission type cold cathode apparatus comprises a mother material layer made of an n-type silicon layer, a conical emitter having an arcuate side surface, an insulating layer formed in a surface region of the mother material layer in a manner to define the arcuate side surface of the emitter and having a concave portion formed to expose the tip portion of the conical emitter, the depth of the concave portion being determined such that the lower portion of the emitter covering a region more than half the height of the emitter is buried in the insulating layer, and a gate electrode formed over the insulating film in a manner to surround the emitter and having an open portion exposing the tip portion of the emitter, the diameter of the open portion being smaller than the diameter in the base portion of the emitter.
公开/授权文献
- US5143270A System for assembling motorcar vehicle body 公开/授权日:1992-09-01
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