发明授权
- 专利标题: Method and apparatus for fabricating semiconductor single crystal
- 专利标题(中): 制造半导体单晶的方法和装置
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申请号: US59770申请日: 1998-04-14
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公开(公告)号: US5900059A公开(公告)日: 1999-05-04
- 发明人: Yoshiyuki Shimanuki , Toshimichi Kubota , Toshirou Kotooka , Makoto Kamogawa
- 申请人: Yoshiyuki Shimanuki , Toshimichi Kubota , Toshirou Kotooka , Makoto Kamogawa
- 申请人地址: JPX Kanagawa
- 专利权人: Komatsu Electronic Metals Co., Ltd.
- 当前专利权人: Komatsu Electronic Metals Co., Ltd.
- 当前专利权人地址: JPX Kanagawa
- 优先权: JPX8-157510 19960529
- 主分类号: C30B15/14
- IPC分类号: C30B15/14 ; C30B35/00
摘要:
This invention provides a method and apparatus for fabricating semiconductor single crystals. By using the method of this invention, the temperature gradient of the single crystal being lifted can be easily controlled. The as-grown defect density can be reduced, and it is possible to manufacture high quality semiconductor single crystals with high oxidation-film breakdown strength. A shield cylinder is used for surrounding the semiconductor single crystal 7 being lifted, the shield cylinder is made to be of the telescopic type and consists of a first shield duct 4, a second shield duct 5, a third shield duct 6. A wire 8 wrapping around a wind-up reel 10 is engaged with the third shield duct 6, and the shield cylinder can be driven to extend or retract by rotating the wind-up reel 10. An ascend and descend rod 3 is connected with the first duct 4, and the shield cylinder can be driven to move upward or downward by lifting or lowering the ascend and descend rod 3. The wind-up reel 10 is driven to retract part of the shield cylinder so that the lapped portion of the shield cylinder keeps a predetermined portion of the semiconductor single crystal 7 being lifted warm, and the temperature gradient of the semiconductor single crystal 7 can be reduced when it passes through the zone whose temperature is within a range from 1000.degree. C. to 1200.degree. C.
公开/授权文献
- USD390147S Deer warning 公开/授权日:1998-02-03
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