- 专利标题： Method of removing surface protrusions from thin films
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申请号： US726955申请日： 1996-10-07
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公开(公告)号： US5902491A公开(公告)日： 1999-05-11
- 发明人: Craig M. Carpenter , James J. Alwan
- 申请人： Craig M. Carpenter , James J. Alwan
- 申请人地址： ID Boise
- 专利权人： Micron Technology, Inc.
- 当前专利权人： Micron Technology, Inc.
- 当前专利权人地址： ID Boise
- 主分类号： B32B3/26
- IPC分类号： B32B3/26 ; B44C1/22 ; C23C14/58 ; H01J9/00 ; H01L29/12 ; H01L29/06
摘要：
A method for removing a surface protrusion projecting from a layer of a first material deposited on a surface of a substrate. In accordance with one embodiment of the invention, a layer of a second material is applied on the layer of first material. A sufficient quantity of the second material is removed to expose the surface protrusion. The first material exposed through the surface protrusion is then removed.
公开/授权文献
- US5196764A Cathode ray tube having symmetrical anode potential 公开/授权日：1993-03-23
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