发明授权
- 专利标题: Undercoating composition for photolithography
- 专利标题(中): 用于光刻的底漆组合物
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申请号: US18910申请日: 1998-02-05
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公开(公告)号: US5908738A公开(公告)日: 1999-06-01
- 发明人: Mitsuru Sato , Katsumi Oomori , Kiyoshi Ishikawa , Etsuko Iguchi , Toshimasa Nakayama
- 申请人: Mitsuru Sato , Katsumi Oomori , Kiyoshi Ishikawa , Etsuko Iguchi , Toshimasa Nakayama
- 申请人地址: JPX
- 专利权人: Tokyo Ohka Kogyo Co., Ltd.
- 当前专利权人: Tokyo Ohka Kogyo Co., Ltd.
- 当前专利权人地址: JPX
- 优先权: JPX6-165663 19940718; JPX7-40523 19950228
- 主分类号: G03F7/004
- IPC分类号: G03F7/004 ; G03F7/09 ; G03F7/11 ; G03F7/26 ; H01L21/027 ; G03C1/825
摘要:
Proposed is a novel undercoating composition used in the photolithographic patterning of a photoresist layer by intervening between the substrate surface and the photoresist layer to decrease the adverse influences of the reflecting light from the substrate surface. The undercoating composition of the invention comprises (a) a melamine compound substituted by methylol groups and/or alkoxymethyl groups and (b) a polyhydroxy benzophenone compound, diphenyl sulfone compound or diphenyl sulfoxide compound, optionally, with admixture of (c) an alkali-insoluble resin of a (meth)acrylic acid ester.
公开/授权文献
- USD365215S Seat 公开/授权日:1995-12-19
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