发明授权
- 专利标题： Surface acoustic wave device with multilayer electrodes and method for manufacturing the same
- 专利标题（中）： 具有多层电极的表面声波装置及其制造方法
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申请号： US762031申请日： 1996-12-11
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公开(公告)号： US5909156A公开(公告)日： 1999-06-01
- 发明人: Tokihiro Nishihara , Hidema Uchishiba , Osamu Ikata , Yoshio Satoh
- 申请人： Tokihiro Nishihara , Hidema Uchishiba , Osamu Ikata , Yoshio Satoh
- 申请人地址： JPX Kanagawa
- 专利权人： Fujitsu Limited
- 当前专利权人： Fujitsu Limited
- 当前专利权人地址： JPX Kanagawa
- 优先权： JPX7-324743 19951213; JPX8-305205 19961115
- 主分类号： C23C14/14
- IPC分类号： C23C14/14 ; H03H3/08 ; H03H9/02 ; H03H9/145 ; H03H9/25 ; H03H9/64
摘要：
A surface acoustic wave device includes an electrode formed by a first film and a second film on a substrate, the first film including an Al film or a film formed by adding at least one other element to Al, and the second film including a metal whose coefficient of diffusion into Al is greater than a self diffusion coefficient of Al. The present invention contributes to improvement of the high-power durability of the electrodes.
公开/授权文献
- US4705869A Preparation of fatty acid esters of ascorbic acid 公开/授权日：1987-11-10
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