发明授权
- 专利标题: Profile measuring apparatus
- 专利标题(中): 型材测量仪器
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申请号: US831080申请日: 1997-04-01
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公开(公告)号: US5917181A公开(公告)日: 1999-06-29
- 发明人: Keiichi Yoshizumi , Keishi Kubo , Shoji Kusumoto , Kiyokazu Uchimura , Keinosuke Kanashima
- 申请人: Keiichi Yoshizumi , Keishi Kubo , Shoji Kusumoto , Kiyokazu Uchimura , Keinosuke Kanashima
- 申请人地址: JPX Osaka
- 专利权人: Marsushita Electric Industrial, Co., Ltd.
- 当前专利权人: Marsushita Electric Industrial, Co., Ltd.
- 当前专利权人地址: JPX Osaka
- 优先权: JPX8-084206 19960405
- 主分类号: G01B5/012
- IPC分类号: G01B5/012 ; G01B11/00 ; G01B21/00 ; G01B21/20
摘要:
A profile measuring apparatus provided with an improved probe for measuring profiles throughout a wide area of the surface of an object with a high level of response and high accuracy. The probe 10 comprises an arm 3 having a stylus 1 fixedly mounted to the distal end thereof, which is coupled to a stationary part 11 of the apparatus by an arm holding member 5 made of a V-shaped leaf spring in such a way that the arm 3 is tilted in one axial direction by a contact pressure exerted thereto during measurement. Displacement of the arm 3 is thereby detected through measuring an elastic deformation of the leaf spring caused by the contact pressure exerted to the stylus 1 being pressed against the surface to be measured.
公开/授权文献
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