发明授权
- 专利标题: Process for producing a ceramic multilayer substrate
- 专利标题(中): 陶瓷多层基板的制造方法
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申请号: US981163申请日: 1997-12-11
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公开(公告)号: US5919325A公开(公告)日: 1999-07-06
- 发明人: Ulrich Goebel , Walter Roethlingshoefer
- 申请人: Ulrich Goebel , Walter Roethlingshoefer
- 申请人地址: DEX Stuttgart
- 专利权人: Robert Bosch GmbH
- 当前专利权人: Robert Bosch GmbH
- 当前专利权人地址: DEX Stuttgart
- 优先权: DEX19615787 19960420
- 主分类号: H05K3/46
- IPC分类号: H05K3/46 ; H01L21/48 ; H01L23/498 ; H05K1/09 ; C04B37/00
摘要:
A process for producing a ceramic multilayer substrate, particularly an LTCC substrate, in which printed circuit traces and plated contactings are produced in a printing process on a plurality of green ceramic foils using a conductive paste which contains a wax as a printing carrier and is free of highly volatile solvents, and the green ceramic foils subsequently being arranged in a stack one upon the other and fired. The otherwise customary, time-consuming drying of the green ceramic foils for the vaporization of the utilized solvent is eliminated. The foils can be stacked and fired immediately after the printing of the printed circuit traces and plated contactings. Furthermore, shrinkage of the printed circuit traces and the green ceramic foils before the firing is avoided, thereby decisively improving the precision of the produced ceramic multilayer substrates.
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