发明授权
- 专利标题： Method of producing ink jet recording head
- 专利标题（中）： 喷墨记录头的制造方法
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申请号： US795565申请日： 1997-02-06
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公开(公告)号： US5922218A公开(公告)日： 1999-07-13
- 发明人: Yoshinao Miyata , Tsutomu Nishiwaki
- 申请人： Yoshinao Miyata , Tsutomu Nishiwaki
- 申请人地址： JPX Tokyo
- 专利权人： Seiko Epson Corporation
- 当前专利权人： Seiko Epson Corporation
- 当前专利权人地址： JPX Tokyo
- 优先权： JPX7-94017 19950419; JPX7-94019 19950419; JPX7-320858 19951208; JPX7-322656 19951212; JPX7-322657 19951212
- 主分类号： B41J2/14
- IPC分类号： B41J2/14 ; B41J2/16 ; B44C1/22 ; H01L21/00
摘要：
In an ink jet head having: a nozzle plate in which a plurality of nozzle openings are formed; a flow path substrate comprising a reservoir to which ink is externally supplied, and a plurality of pressure chambers which are connected to the reservoir via an ink supply port and which respectively communicate with the nozzle openings; an elastic film which pressurizes ink in the pressure chambers; and driving means located at a position opposing the respective pressure chambers for causing the elastic film to conduct flexural deformation, the pressure chambers are arranged in a single-crystal silicon substrate of a (110) lattice plane and along a lattice orientation.
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