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US5932804A Vibrating structure gyroscope 失效
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Vibrating structure gyroscope
摘要:
A vibrating structure gyroscope has a vibratory resonator having a substantially ring or hoop-like shape structure, an electromagnetic drive for causing the resonator to vibrate, a support structure including a plurality of flexible support beams for supporting the resonator whilst allowing it to vibrate and an electromagnetic sensor for sensing movement of the resonator. The support beams and resonator are made from silicon and the electromagnetic drive and sensor include metal tracks which extend externally along each support beam onto and along respective segments of an outer substantially planar surface of the ring-like resonator. The resonator is substantially planar and means is produced a magnetic field substantially perpendicular to the plane of the resonator.
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