发明授权
US5936157A Thermosensitive flow rate detecting element and flow rate sensor using
same
失效
热敏流量检测元件和使用其的流量传感器
- 专利标题: Thermosensitive flow rate detecting element and flow rate sensor using same
- 专利标题(中): 热敏流量检测元件和使用其的流量传感器
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申请号: US968569申请日: 1997-11-12
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公开(公告)号: US5936157A公开(公告)日: 1999-08-10
- 发明人: Akira Yamashita , Masahiro Kawai , Tomoya Yamakawa , Yutaka Ohashi
- 申请人: Akira Yamashita , Masahiro Kawai , Tomoya Yamakawa , Yutaka Ohashi
- 申请人地址: JPX Tokyo
- 专利权人: Mitsubishi Denki Kabushiki Kaisha
- 当前专利权人: Mitsubishi Denki Kabushiki Kaisha
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX9-178060 19970703
- 主分类号: G01P5/12
- IPC分类号: G01P5/12 ; G01F1/68 ; G01F1/684 ; G01F1/692
摘要:
A thermosensitive flow rate detecting element having a flat substrate is provided with a gap having an opening on at least one side thereof for the flow of a fluid, an insulating support film provided on the one side of the substrate, a sensor unit which has a heating element for heating the fluid and a thermosensitive element for detecting temperature of the fluid provided in the upper position of the opening on the insulating support film, and a fluid temperature measuring element, provided at a distance from the sensor unit on the one side of the flat substrate, for detecting temperature of the fluid. The thermosensitive flow rate detecting element measures flow rate or flow velocity of the fluid on the basis of a temperature detected by the thermosensitive element, by keeping heating temperature of the heating element at a level higher than a temperature detected by the fluid temperature measuring element by a prescribed difference in temperature. A first notch is provided on the flat substrate near the fluid temperature measuring element and is formed by removing a part of the flat substrate from either side thereof so as not to reach the remaining side thereof.
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