发明授权
- 专利标题: Undercoating composition for photolithographic resist
- 专利标题(中): 光刻抗蚀剂底涂组合物
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申请号: US845358申请日: 1997-04-24
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公开(公告)号: US5939510A公开(公告)日: 1999-08-17
- 发明人: Mitsuru Sato , Katsumi Oomori , Etsuko Iguchi , Kiyoshi Ishikawa , Fumitake Kaneko
- 申请人: Mitsuru Sato , Katsumi Oomori , Etsuko Iguchi , Kiyoshi Ishikawa , Fumitake Kaneko
- 申请人地址: JPX
- 专利权人: Tokyo Ohka Kogya Co., Ltd.
- 当前专利权人: Tokyo Ohka Kogya Co., Ltd.
- 当前专利权人地址: JPX
- 优先权: JPX8-105921 19960425
- 主分类号: G03F7/11
- IPC分类号: G03F7/11 ; C09K3/00 ; G03F7/09 ; H01L21/027 ; C08G8/02 ; C08G12/00
摘要:
Proposed is a novel undercoating composition to form an undercoating layer interposed between the surface of a substrate and a photoresist layer with an object to decrease the adverse influences by the reflection of light on the substrate surface in the pattern-wise exposure of the photoresist layer to ultraviolet light without the undesirable phenomena of intermixing between layers and notching along with a large selectivity ratio in the etching rates between the patterned resist layer and the undercoating layer in a dry-etching treatment. The undercoating composition comprises (A) an ultraviolet absorber which is a benzophenone compound or an aromatic azomethine compound each having at least one unsubstituted or alkyl-substituted amino group on the aryl groups and (B) a crosslinking agent which is preferably a melamine compound having at least two methylol groups or alkoxymethyl groups bonded to the nitrogen atoms in a molecule in a weight proportion (A):(B) in the range from 1:1 to 1:10.
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