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US5939722A Semiconductor detector for infrared radiation and method for manufacturing same 失效
用于红外辐射的半导体探测器及其制造方法

Semiconductor detector for infrared radiation and method for
manufacturing same
摘要:
A semiconductor detector for infrared radiation is manufactured by the steps of depositing an auxiliary layer on a main surface of a carrier, depositing a membrane layer provided with at least one opening onto the auxiliary layer, selectively etching the auxiliary layer through the at least one opening of the membrane layer, so that a hollow space arises in the auxiliary layer, sealing the hollow space by depositing a covering on th membrane layer, and fashioning a detector element on the covering by depositing a material sensitive to infrared radiation within a region of the covering that is bounded by the hollow space therebelow.
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