发明授权
US5939722A Semiconductor detector for infrared radiation and method for
manufacturing same
失效
用于红外辐射的半导体探测器及其制造方法
- 专利标题: Semiconductor detector for infrared radiation and method for manufacturing same
- 专利标题(中): 用于红外辐射的半导体探测器及其制造方法
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申请号: US958582申请日: 1997-10-28
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公开(公告)号: US5939722A公开(公告)日: 1999-08-17
- 发明人: Wolfgang Werner , Rainer Bruchhaus , Wolfram Wersing
- 申请人: Wolfgang Werner , Rainer Bruchhaus , Wolfram Wersing
- 申请人地址: DEX Munich
- 专利权人: Siemens Aktiengesellschaft
- 当前专利权人: Siemens Aktiengesellschaft
- 当前专利权人地址: DEX Munich
- 优先权: DEX19645036 19961031
- 主分类号: G01J5/20
- IPC分类号: G01J5/20 ; H01L37/02
摘要:
A semiconductor detector for infrared radiation is manufactured by the steps of depositing an auxiliary layer on a main surface of a carrier, depositing a membrane layer provided with at least one opening onto the auxiliary layer, selectively etching the auxiliary layer through the at least one opening of the membrane layer, so that a hollow space arises in the auxiliary layer, sealing the hollow space by depositing a covering on th membrane layer, and fashioning a detector element on the covering by depositing a material sensitive to infrared radiation within a region of the covering that is bounded by the hollow space therebelow.
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