Invention Grant
US5940299A System & method for controlling a process-performing apparatus in a
semiconductor device-manufacturing process
失效
用于在半导体器件制造工艺中控制处理执行装置的系统和方法
- Patent Title: System & method for controlling a process-performing apparatus in a semiconductor device-manufacturing process
- Patent Title (中): 用于在半导体器件制造工艺中控制处理执行装置的系统和方法
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Application No.: US718673Application Date: 1996-09-24
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Publication No.: US5940299APublication Date: 1999-08-17
- Inventor: Sang-koog Choi , Jae-Kyung Lee , Sang-woon Kim
- Applicant: Sang-koog Choi , Jae-Kyung Lee , Sang-woon Kim
- Applicant Address: KRX Kyungki-do
- Assignee: SamSung Electronics Co., Ltd.
- Current Assignee: SamSung Electronics Co., Ltd.
- Current Assignee Address: KRX Kyungki-do
- Priority: KRX95-35422 19951013
- Main IPC: H01L21/677
- IPC: H01L21/677 ; B65G61/00 ; G01R31/08 ; G05B15/02 ; G05B19/418 ; G06F11/00 ; G06F19/00 ; G06G7/66 ; G06Q50/00 ; G06Q50/04 ; H01L21/02 ; H01L21/68
Abstract:
A control system of a semiconductor device manufacturing process is disclosed. The system includes a main host computer, host computers connected to the main host computer and process performing apparatuses connected to the host computers. The system checks the integrity of transferred operational instructions between the host computers and process performing apparatuses, in order to prevent errors in the manufacturing process. When the error is detected the system user is notified by audio signals or visual displays.
Public/Granted literature
- US5241405A Cover for adjusting the bend of an original Public/Granted day:1993-08-31
Information query
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