发明授权
- 专利标题: Seed crystal holder
- 专利标题(中): 种子晶体座
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申请号: US140288申请日: 1998-08-25
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公开(公告)号: US5948164A公开(公告)日: 1999-09-07
- 发明人: Makoto Iida , Eiichi Iino , Masanori Kimura , Shozo Muraoka
- 申请人: Makoto Iida , Eiichi Iino , Masanori Kimura , Shozo Muraoka
- 申请人地址: JPX Tokyo
- 专利权人: Shin Etsu Handotai Co., Ltd.
- 当前专利权人: Shin Etsu Handotai Co., Ltd.
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX9-252749 19970902
- 主分类号: C30B15/32
- IPC分类号: C30B15/32 ; C30B29/06 ; D04H1/4209 ; H01L21/208 ; C30B35/00
摘要:
A seed crystal holder used in a crystal pulling apparatus operated in accordance with the Czochralski method. In the seed crystal holder, a heat-resistant cushioning material is provided between the surface of a seed crystal and the contact surface of claws of the holder or between a cutaway surface of the seed crystal and a contact surface of an insert of the holder. The heat-resistant cushioning material is selected from the group consisting of carbon fiber felt, glass fiber felt, metallic fiber felt, or selected from materials that cause plastic deformation such as Al.
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