发明授权
- 专利标题: Semiconductor pressure detecting device
- 专利标题(中): 半导体压力检测装置
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申请号: US151104申请日: 1998-09-10
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公开(公告)号: US5948992A公开(公告)日: 1999-09-07
- 发明人: Masahiro Yamamoto
- 申请人: Masahiro Yamamoto
- 申请人地址: JPX Tokyo
- 专利权人: Mitsubishi Denki Kabushiki Kaisha
- 当前专利权人: Mitsubishi Denki Kabushiki Kaisha
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX10-114783 19980424
- 主分类号: G01L9/04
- IPC分类号: G01L9/04 ; G01L9/00 ; G01L9/16
摘要:
In a semiconductor pressure detecting device, residual stress due to die bonding between pedestal seat and base member as well as stress due to welding between base member and cap are reduced. The semiconductor pressure detecting device comprises a semiconductor sensor element having a thin-walled pressure-receiving portion, a pedestal seat, a base member and a cap, wherein pressure fluid is introduced to a pressure chamber via pressure fluid introducing holes of the base member and the pedestal seat so that pressure of the fluid is detected by the semiconductor sensor element. Outer peripheral configuration of the bonding surface of the pedestal seat to the base member is rectangular shaped, and bonding length in the direction of the diagonal line of the rectangular shape is set based on a prescribed maximum operating pressure of the semiconductor pressure detecting device, conditions for generation of residual strain during a bonding process between the pedestal seat and the base member and conditions for generation of strain during a bonding process of the cap to the base member.
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