发明授权
- 专利标题: Method for making bump disks
- 专利标题(中): 制造碰撞盘的方法
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申请号: US877100申请日: 1997-05-26
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公开(公告)号: US5951880A公开(公告)日: 1999-09-14
- 发明人: Chun-Jen Chen , Ming-Hung Su , Joseph C-C Hung , James Hsi-Tang Lee
- 申请人: Chun-Jen Chen , Ming-Hung Su , Joseph C-C Hung , James Hsi-Tang Lee
- 申请人地址: TWX Hsinchu
- 专利权人: Trace Storage Tech. Corp.
- 当前专利权人: Trace Storage Tech. Corp.
- 当前专利权人地址: TWX Hsinchu
- 主分类号: G11B5/60
- IPC分类号: G11B5/60 ; G11B23/00 ; G11B33/10 ; B44C1/22
摘要:
A wet etching method for making calibration bump disks for use in providing quality control of production run magnetic hard disks is disclosed. It includes the steps of: (a) coating a layer of bump material on a substrate; (b) coating a photoresist layer on the layer of bump material; (c) exposing the photoresist layer to a light source under a photomask; (d) developing the photoresist layer using a developer solution to form an undeveloped photoresist layer; (e) etching the substrate containing the layer of bump material and the undeveloped photoresist layer to remove portions of the layer of bump material not covered by the undeveloped photoresist layer; and (f) stripping the undeveloped photoresist layer to leave at least a bump on the substrate which was originally covered by the undeveloped photoresist layer. The wet etching method eliminates many of the problems observed from the conventional metal mask method, including the elimination of the convex-shaped bump surface.
公开/授权文献
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