Invention Grant
US5952573A Micro-beam motion sensor 失效
微光束运动传感器

Micro-beam motion sensor
Abstract:
A cantilevered micro-beam formed on a micro-circuit substrate such that when beam is vibrated it produces an output signal directly related to rotation of the substrate about an axis perpendicular to the beam and the direction of vibration.
Information query
Patent Agency Ranking
0/0