发明授权
US5952574A Trenches to reduce charging effects and to control out-of-plane
sensitivities in tuning fork gyroscopes and other sensors
失效
减少充电效应和控制音叉陀螺仪和其他传感器的平面外灵敏度的沟槽
- 专利标题： Trenches to reduce charging effects and to control out-of-plane sensitivities in tuning fork gyroscopes and other sensors
- 专利标题（中）： 减少充电效应和控制音叉陀螺仪和其他传感器的平面外灵敏度的沟槽
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申请号： US841224申请日： 1997-04-29
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公开(公告)号： US5952574A公开(公告)日： 1999-09-14
- 发明人: Marc S. Weinberg , Steven T. Cho , Ralph E. Hopkins, III , Lance C. Niles , Anthony S. Kourepenis , Eric M. Hildebrant , Paul A. Ward
- 申请人： Marc S. Weinberg , Steven T. Cho , Ralph E. Hopkins, III , Lance C. Niles , Anthony S. Kourepenis , Eric M. Hildebrant , Paul A. Ward
- 申请人地址： MA Cambridge
- 专利权人： The Charles Stark Draper Laboratory, Inc.
- 当前专利权人： The Charles Stark Draper Laboratory, Inc.
- 当前专利权人地址： MA Cambridge
- 主分类号： G01C19/5719
- IPC分类号： G01C19/5719 ; G01C19/00
摘要：
Trenches which reduce or eliminate force and sensitivity associated with proof mass motion normal to the substrate as a result of voltage transients is disclosed. The trenches provide increased separation between interleaved comb electrodes and the substrate, and thereby also reduce the comb lift to drive ratio. The trenches are typically formed directly below the interleaved comb electrodes, but may also be formed below other suspended portions. Trench depth is from 6-10 microns and provides a comb electrode to substrate separation of approximately 8.5-12.5 microns.
公开/授权文献
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