发明授权
- 专利标题: Light beam scanner using large electrostatic force
- 专利标题(中): 光束扫描仪采用大静电力
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申请号: US123521申请日: 1998-07-28
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公开(公告)号: US5959760A公开(公告)日: 1999-09-28
- 发明人: Keizo Yamada , Toshihide Kuriyama
- 申请人: Keizo Yamada , Toshihide Kuriyama
- 申请人地址: JPX Tokyo
- 专利权人: NEC Corporation
- 当前专利权人: NEC Corporation
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX9-205707 19970731
- 主分类号: G02B7/182
- IPC分类号: G02B7/182 ; G02B26/08 ; G02B26/10 ; H04N1/113
摘要:
A light beam scanner includes a supporting substrate. Fixed electrodes of a first set are provided on the supporting substrate to oppose to each other. A mirror is provided between the fixed electrodes, has torsion bars physically connected to the supporting substrate and a mirror electrode section in end portions of the mirror opposing to the fixed electrodes at least. The mirror rotatably vibrates between an upper position of the one fixed electrode and a lower position thereof by torsion force of the torsion bars and electrostatic force due to the voltage using the torsion bars as a rotation axis, when a voltage is applied between one of the fixed electrodes and the electrode section.
公开/授权文献
- US4793653A Reclining device for automotive seat 公开/授权日:1988-12-27