发明授权
US5961916A Method of manufacturing a passage tube for passing plasma producing gas
失效
制造通过等离子体产生气体的通道管的方法
- 专利标题： Method of manufacturing a passage tube for passing plasma producing gas
- 专利标题（中）： 制造通过等离子体产生气体的通道管的方法
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申请号： US48659申请日： 1998-03-26
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公开(公告)号： US5961916A公开(公告)日： 1999-10-05
- 发明人: Toshio Ohashi , Michio Asai
- 申请人： Toshio Ohashi , Michio Asai
- 申请人地址： JPX
- 专利权人： NGK Insulators, Ltd.
- 当前专利权人： NGK Insulators, Ltd.
- 当前专利权人地址： JPX
- 优先权： JPX9-075327 19970327
- 主分类号： B28B21/92
- IPC分类号： B28B21/92 ; C04B35/64 ; C04B37/00 ; H01L21/205 ; H01L21/302 ; H01L21/3065 ; H05H1/24 ; C04B33/32
摘要：
A passage tube including a ceramic tube body through which plasma producing gas passes and is irradiated from outside the ceramic tube body with ultraviolet rays, and a ceramic flange member joined to an outer peripheral surface of the ceramic tube body, is manufactured by forming calcined bodies for the passage tube body and flange member, machining the calcined body for the tube body so as to form a first portion and a second portion having an outer diameter larger than that of the first portion, joining the calcined body for the flange member to a stepped region between the first portion and the second portion and sintering them.
公开/授权文献
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