发明授权
- 专利标题: Surface inspection tool
- 专利标题(中): 表面检测工具
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申请号: US840358申请日: 1997-04-28
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公开(公告)号: US5969370A公开(公告)日: 1999-10-19
- 发明人: Wayne Isami Imaino , Anthony Juliana, Jr. , Milton Russell Latta , Charles H. Lee , Wai Cheung Leung , Hal J. Rosen
- 申请人: Wayne Isami Imaino , Anthony Juliana, Jr. , Milton Russell Latta , Charles H. Lee , Wai Cheung Leung , Hal J. Rosen
- 申请人地址: NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: NY Armonk
- 主分类号: G01N21/88
- IPC分类号: G01N21/88 ; G11B7/0037 ; G11B7/26
摘要:
A laser based inspection tool (LIT) for inspecting planar surfaces is described. In a preferred embodiment the LIT can simultaneously inspect both planar surfaces of disks for use in disk drives. In one embodiment of the invention, a disk is moved into an inspection subcompartment between a pair of air knives which blow partially ionized air onto the planar sides of the disk to remove loose particles adhering thereto. After the disk moves through the air knife streams, the two laser beams scan the two sides of the disk. Preferably the scan occurs after the air knives have been turned off and as the disk moves out of the inspection subcompartment. The subcompartment may optionally have an air source which forces air to flow out of the subcompartment to aid in maintaining a clean environment for inspection.
公开/授权文献
- US5211740A Herbicidal aminoguanidinoazines 公开/授权日:1993-05-18
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