Invention Grant
- Patent Title: Broadband spectroscopic rotating compensator ellipsometer
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Application No.: US76673Application Date: 1998-05-12
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Publication No.: US5973787APublication Date: 1999-10-26
- Inventor: David E. Aspnes , Jon Opsal
- Applicant: David E. Aspnes , Jon Opsal
- Applicant Address: CA Fremont
- Assignee: Therma-Wave, Inc.
- Current Assignee: Therma-Wave, Inc.
- Current Assignee Address: CA Fremont
- Main IPC: G01N21/21
- IPC: G01N21/21 ; G01B11/06 ; G01J3/02 ; G01J3/447 ; G01J4/00 ; G01J4/04 ; G02F1/01

Abstract:
An ellipsometer, and a method of ellipsometry, for analyzing a sample using a broad range of wavelengths, includes a light source for generating a beam of polychromatic light having a range of wavelengths of light for interacting with the sample. A polarizer polarizes the light beam before the light beam interacts with the sample. A rotating compensator induces phase retardations of a polarization state of the light beam wherein the range of wavelengths and the compensator are selected such that at least a first phase retardation value is induced that is within a primary range of effective retardations of substantially 135.degree. to 225.degree., and at least a second phase retardation value is induced that is outside of the primary range. An analyzer interacts with the light beam after the light beam interacts with the sample. A detector measures the intensity of light after interacting with the analyzer as a function of compensator angle and of wavelength, preferably at all wavelengths simultaneously. A processor determines the polarization state of the beam as it impinges the analyzer from the light intensities measured by the detector.
Public/Granted literature
- USD399298S Air freshener container Public/Granted day:1998-10-06
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