- 专利标题: Broadband spectroscopic rotating compensator ellipsometer
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申请号: US76673申请日: 1998-05-12
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公开(公告)号: US5973787A公开(公告)日: 1999-10-26
- 发明人: David E. Aspnes , Jon Opsal
- 申请人: David E. Aspnes , Jon Opsal
- 申请人地址: CA Fremont
- 专利权人: Therma-Wave, Inc.
- 当前专利权人: Therma-Wave, Inc.
- 当前专利权人地址: CA Fremont
- 主分类号: G01N21/21
- IPC分类号: G01N21/21 ; G01B11/06 ; G01J3/02 ; G01J3/447 ; G01J4/00 ; G01J4/04 ; G02F1/01
摘要:
An ellipsometer, and a method of ellipsometry, for analyzing a sample using a broad range of wavelengths, includes a light source for generating a beam of polychromatic light having a range of wavelengths of light for interacting with the sample. A polarizer polarizes the light beam before the light beam interacts with the sample. A rotating compensator induces phase retardations of a polarization state of the light beam wherein the range of wavelengths and the compensator are selected such that at least a first phase retardation value is induced that is within a primary range of effective retardations of substantially 135.degree. to 225.degree., and at least a second phase retardation value is induced that is outside of the primary range. An analyzer interacts with the light beam after the light beam interacts with the sample. A detector measures the intensity of light after interacting with the analyzer as a function of compensator angle and of wavelength, preferably at all wavelengths simultaneously. A processor determines the polarization state of the beam as it impinges the analyzer from the light intensities measured by the detector.
公开/授权文献
- USD399298S Air freshener container 公开/授权日:1998-10-06
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