发明授权
US5980188A Semiconductor manufacturing device including sensor for sensing
mis-loading of a wafer
失效
半导体制造装置包括用于感测晶片错误加载的传感器
- 专利标题： Semiconductor manufacturing device including sensor for sensing mis-loading of a wafer
- 专利标题（中）： 半导体制造装置包括用于感测晶片错误加载的传感器
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申请号： US977883申请日： 1997-11-28
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公开(公告)号： US5980188A公开(公告)日： 1999-11-09
- 发明人: Yong-in Ko , Jae-sang Park , Kyung-soo Kim , Jae-bum Park
- 申请人： Yong-in Ko , Jae-sang Park , Kyung-soo Kim , Jae-bum Park
- 申请人地址： KRX Suwon
- 专利权人： Samsung Electronics Co., Ltd.
- 当前专利权人： Samsung Electronics Co., Ltd.
- 当前专利权人地址： KRX Suwon
- 优先权： KRX97-17949 19970509
- 主分类号： B65G1/00
- IPC分类号： B65G1/00 ; B65G43/08 ; B65G49/07 ; H01L21/66 ; H01L21/673 ; H01L21/677 ; H01L21/68 ; G01B11/04
摘要：
An apparatus and method for carrying wafers through a multi-step process for producing a semiconductor, without using a cassette, where the apparatus senses whether a wafer is mis-loaded. The apparatus includes a plurality of optical sensors positioned above the wafers for sensing whether a wafer is mis-loaded by transmitting light past circumferential edges of the wafers.