发明授权
US5981959A Pixelized scintillation layer and structures incorporating same 失效
像素化闪烁层和结合其的结构

  • 专利标题: Pixelized scintillation layer and structures incorporating same
  • 专利标题(中): 像素化闪烁层和结合其的结构
  • 申请号: US985891
    申请日: 1997-12-05
  • 公开(公告)号: US5981959A
    公开(公告)日: 1999-11-09
  • 发明人: Raj B. Apte
  • 申请人: Raj B. Apte
  • 申请人地址: CT Stamford
  • 专利权人: Xerox Corporation
  • 当前专利权人: Xerox Corporation
  • 当前专利权人地址: CT Stamford
  • 主分类号: G01T1/20
  • IPC分类号: G01T1/20
Pixelized scintillation layer and structures incorporating same
摘要:
A pixelized scintillation layer is taught in which high aspect ratio columns of scintillation material are formed. The columns may be sized and spaced to correspond to the sizing and spacing of an underlying sensor array, or they may be sized such that there is plurality of columns for each pixel. A method for forming the pixelized scintillation layer includes the step of forming openings such as wells, vias, or channels in a body, for example by etching a thick photoresist, ion beam etching, anodic etching, etc., and the step of filling the openings with scintillation material. A completed image sensing apparatus is also taught.
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