发明授权
- 专利标题: Method of manufacturing vertical power device
- 专利标题(中): 垂直功率器件的制造方法
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申请号: US816596申请日: 1997-03-13
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公开(公告)号: US5985708A公开(公告)日: 1999-11-16
- 发明人: Akio Nakagawa , Naoharu Sugiyama , Tomoko Matsudai , Norio Yasuhara , Atsusi Kurobe , Hideyuki Funaki , Yusuke Kawaguchi , Yoshihiro Yamaguchi
- 申请人: Akio Nakagawa , Naoharu Sugiyama , Tomoko Matsudai , Norio Yasuhara , Atsusi Kurobe , Hideyuki Funaki , Yusuke Kawaguchi , Yoshihiro Yamaguchi
- 申请人地址: JPX Kawasaki
- 专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人地址: JPX Kawasaki
- 优先权: JPX8-055990 19960313; JPX8-073397 19960328; JPX8-076076 19960329; JPX8-246437 19960918; JPX8-246709 19960918; JPX8-246722 19960918; JPX9-054722 19970310; JPX9-054733 19970310; JPX9-057804 19970312; JPX9-058726 19970313
- 主分类号: H01L27/12
- IPC分类号: H01L27/12 ; H01L29/73 ; H01L29/739 ; H01L29/786 ; H01L21/8249
摘要:
A semiconductor apparatus comprising a vertical type semiconductor device having a first conducting type semiconductor substrate, a drain layer formed on the surface of the semiconductor substrate, a drain electrode formed on the surface of the drain layer, a second conducting type base layer selectively formed on the surface of the semiconductor substrate opposite to the drain layer, a first conducting type source layer selectively formed on the surface of the second conducting type base layer, a source electrode formed on the first conducting type source layer and the second conducting type base layer, and a gate electrode formed in contact with the first conducting type source layer, the second conducting type base layer and the semiconductor substrate through a gate insulating film and a lateral semiconductor device having an insulating layer formed in a region of the surface of the semiconductor substrate different from the second conducting type base layer, and a polycrystalline semiconductor layer formed on the insulating layer and having a first conducting type region and a second conducting type region, wherein the first conducting type source layer of the vertical semiconductor device and the first conducting type region of the polycrystalline semiconductor layer are simultaneously formed.
公开/授权文献
- US5222389A Multi-channel gas sample chamber 公开/授权日:1993-06-29
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