发明授权
- 专利标题： Electrostatic support assembly having an integral ion focus ring
- 专利标题（中）： 具有整体离子聚焦环的静电支撑组件
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申请号： US868041申请日： 1997-06-03
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公开(公告)号： US5986874A公开(公告)日： 1999-11-16
- 发明人: Eric Ross , Jae Park , Alexandre de Chambrier
- 申请人： Eric Ross , Jae Park , Alexandre de Chambrier
- 申请人地址： CA Palo Alto
- 专利权人： Watkins-Johnson Company
- 当前专利权人： Watkins-Johnson Company
- 当前专利权人地址： CA Palo Alto
- 主分类号： H01L21/302
- IPC分类号： H01L21/302 ; H01L21/205 ; H01L21/683 ; H02N13/00
摘要：
An electrostatic support assembly for supporting a substrate. The support assembly includes a non-metallic body having a support surface for supporting the substrate and an integral peripheral outer portion extending outwardly from and substantially surrounding the support surface of the substrate. The support assembly also includes at least one electrode carried by the non-metallic body for electrostatically coupling a substrate to the support surface of the non-metallic body and a base coupled to the underside of the non-metallic body for the transfer of heat between the non-metallic body and the base.