发明授权
- 专利标题： Magnetic carrier head for chemical mechanical polishing
- 专利标题（中）： 用于化学机械抛光的磁性载体头
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申请号： US933815申请日： 1997-09-19
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公开(公告)号： US5989103A公开(公告)日： 1999-11-23
- 发明人: Manoocher Birang , John Prince , James Nystrom
- 申请人： Manoocher Birang , John Prince , James Nystrom
- 申请人地址： CA Santa Clara
- 专利权人： Applied Materials, Inc.
- 当前专利权人： Applied Materials, Inc.
- 当前专利权人地址： CA Santa Clara
- 主分类号： B23Q3/154
- IPC分类号： B23Q3/154 ; B24B41/06 ; B24B1/00
摘要：
A carrier head assembly including a drive shaft and a system flange connectable to the drive shaft where the system flange includes a number of magnetic plates. The carrier head assembly also includes a carrier head flange. The carrier head flange has more magnetic plates, these magnetic plates generally facing the previous plates. The magnetic plates magnetically engage to couple the carrier head flange to the system flange.
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