发明授权
- 专利标题: Method for preventing facet coating overspray
- 专利标题(中): 防止小面涂层过喷的方法
-
申请号: US61410申请日: 1998-04-16
-
公开(公告)号: US5989637A公开(公告)日: 1999-11-23
- 发明人: John S. Rizzo , Gustav Edward Derkits, Jr. , Raymond Frank Gruszka , John E. Boyd
- 申请人: John S. Rizzo , Gustav Edward Derkits, Jr. , Raymond Frank Gruszka , John E. Boyd
- 申请人地址: NJ Murray Hill
- 专利权人: Lucent Technologies, Inc.
- 当前专利权人: Lucent Technologies, Inc.
- 当前专利权人地址: NJ Murray Hill
- 主分类号: H01S5/02
- IPC分类号: H01S5/02 ; H01S5/028 ; H01S5/042 ; B05D1/32
摘要:
A method and apparatus for preventing overspray onto bonding pads of a laser bar during facet coating includes manufacturing inserts with gaskets that are aligned with the laser bar such that the gaskets mask off the bonding pads during the facet coating process so that no overspray onto the bonding pads occurs. The gaskets are preferably made of gold with a thin titanium coating to prevent thermal compression bonding with the bonding pads. The inserts with gaskets are preferably manufactured using standard wafer processing techniques. The gaskets are preferably formed using the compliant layer metalization process described in U.S. Pat. No. 5,559,817.
公开/授权文献
- US4785932A Medicine dispenser 公开/授权日:1988-11-22
信息查询