发明授权
US5992225A Cantilever probe and scanning type probe microscope utilizing the
cantilever probe
失效
悬臂式探头和扫描型探针显微镜利用悬臂式探头
- 专利标题： Cantilever probe and scanning type probe microscope utilizing the cantilever probe
- 专利标题（中）： 悬臂式探头和扫描型探针显微镜利用悬臂式探头
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申请号： US987734申请日： 1997-12-09
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公开(公告)号： US5992225A公开(公告)日： 1999-11-30
- 发明人: Yoshiharu Shirakawabe , Nobuhiro Shimizu , Hiroshi Takahashi
- 申请人： Yoshiharu Shirakawabe , Nobuhiro Shimizu , Hiroshi Takahashi
- 申请人地址： JPX
- 专利权人： Seiko Instruments Inc.
- 当前专利权人： Seiko Instruments Inc.
- 当前专利权人地址： JPX
- 优先权： JPX8-329877 19961210
- 主分类号： G01B21/30
- IPC分类号： G01B21/30 ; B81C1/00 ; G01B7/34 ; G01N27/00 ; G01N37/00 ; G01Q60/38
摘要：
A cantilever probe for scanning a sample surface comprises a cantilever having a free end and a fixed end. A first support section is disposed at the free end and extends along a first plane. A probe is formed on the first support section for scanning movement relative to the sample surface. A second support section is disposed at the fixed end and extends along a second plane different from the first plane. A beam section interconnects the first support member and the second support member to one another and extends along a third plane different from the first and second planes.
公开/授权文献
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