发明授权
- 专利标题: Apparatus and method for compressing high purity gas
- 专利标题(中): 用于压缩高纯度气体的装置和方法
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申请号: US57518申请日: 1998-04-09
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公开(公告)号: US5993170A公开(公告)日: 1999-11-30
- 发明人: Joe Stevens , Allen Thompson , Norman Cowan , David Alvarez
- 申请人: Joe Stevens , Allen Thompson , Norman Cowan , David Alvarez
- 申请人地址: CA Santa Clara
- 专利权人: Applied Materials, Inc.
- 当前专利权人: Applied Materials, Inc.
- 当前专利权人地址: CA Santa Clara
- 主分类号: F04B35/00
- IPC分类号: F04B35/00 ; F04B39/00 ; F04B39/04 ; H05B1/00
摘要:
An improved method and apparatus are disclosed for isolating product gas from compressor operating fluid. A portion of a piston rod directly exposed to the compressor's operating fluid (the oily portion of the piston rod) is atmospherically isolated from the remaining portion of the piston rod by providing the piston rod with a collar that separates the oily portion of the piston rod from the remainder of the piston rod. A first and a second flexible membrane are coupled to the collar to form a first isolation region, and a second isolation region; the first isolation region encases the oily portion of the piston rod and atmospherically isolates it from the second isolation region, and the second isolation region provides additional isolation from both the operating fluid and the ambient environment. A higher pressure is maintained along the backside of the piston that compresses the product gas than the pressure within the adjacent isolation region. Pairs of wipers with vents coupled therebetween additionally may be employed to further improve product gas isolation.
公开/授权文献
- US5347439A Flashlight holder 公开/授权日:1994-09-13
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