- 专利标题: Photoresist layer supporting film and photoresist film laminate
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申请号: US855468申请日: 1997-05-13
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公开(公告)号: US5994027A公开(公告)日: 1999-11-30
- 发明人: Takafumi Kudo , Tetsuo Yoshida , Yukihiko Minamihira , Kazutaka Masaoka , Youji Tanaka , Noriyo Kimura
- 申请人: Takafumi Kudo , Tetsuo Yoshida , Yukihiko Minamihira , Kazutaka Masaoka , Youji Tanaka , Noriyo Kimura
- 申请人地址: JPX Osaka
- 专利权人: Teijin Limited
- 当前专利权人: Teijin Limited
- 当前专利权人地址: JPX Osaka
- 优先权: JPX8-124576 19960520; JPX8-124577 19960520
- 主分类号: G03F7/09
- IPC分类号: G03F7/09 ; G03F7/16 ; H05K3/00 ; H05K3/46 ; G03C1/795
摘要:
A photoresist layer supporting film is (A) formed from a polymer composition comprising (i) 55 to 100% by weight of a copolyester containing ethylene terephthalate units as a main recurring unit and having a melting point of 210 to 250.degree. C. and (ii) 0 to 45% by weight of polybutylene terephthalate or a copolyester containing butylene terephthalate units as a main recurring unit and having a melting point of not lower than 180.degree. C. and (B) has a plane orientation coefficient of 0.08 to 0.16. Since this supporting film is excellent in substrate shape follow-up properties and resolution, it is suitable for the preparation of a photoresist film laminate by laminating a protective film and a photoresist layer on the surface thereof.
公开/授权文献
- US5637406A Metallized aluminum nitride substrate 公开/授权日:1997-06-10
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