发明授权
- 专利标题: Method for evacuating and sealing field emission displays
- 专利标题(中): 排气和密封场发射显示器的方法
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申请号: US124492申请日: 1998-07-29
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公开(公告)号: US5997378A公开(公告)日: 1999-12-07
- 发明人: Danny Dynka , David A. Cathey, Jr. , Larry D. Kinsman
- 申请人: Danny Dynka , David A. Cathey, Jr. , Larry D. Kinsman
- 申请人地址: ID Boise
- 专利权人: Micron Technology, Inc.
- 当前专利权人: Micron Technology, Inc.
- 当前专利权人地址: ID Boise
- 主分类号: H01J9/02
- IPC分类号: H01J9/02 ; H01J9/26 ; H01J9/385 ; H01J9/39 ; H01J9/40 ; H01J31/12
摘要:
A method for evacuating and sealing a field emission display package is provided. The method includes forming a cover plate, a backplate, and a peripheral seal therebetween. The backplate is formed as a sub-assembly which includes a seal ring and a getter material. The seal ring includes compressible protrusions for initially separating the cover plate from the seal ring to provide evacuation openings. During a sealing and evacuation process the packages are placed in the reaction chamber of a furnace. The pressure in the reaction chamber is then reduced and the temperature is increased in a staged sequence. During the evacuating and sealing process the evacuation openings formed by the compressible protrusions provide a flow path for evacuation. As the sealing and evacuation process continues, the compressible protrusions and seal ring flow and commingle to form the peripheral seal. At the same time the getter material is activated and pumps contaminants from the sealed spaced formed within the package.
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