发明授权
- 专利标题: Method for preventing electrostatic discharge damage to an insulating article
- 专利标题(中): 防止静电放电损坏绝缘物品的方法
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申请号: US958531申请日: 1997-10-27
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公开(公告)号: US5999397A公开(公告)日: 1999-12-07
- 发明人: Ming-Fa Chen , Shih-Shiung Chen , Ying-Chen Chao
- 申请人: Ming-Fa Chen , Shih-Shiung Chen , Ying-Chen Chao
- 申请人地址: TWX Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TWX Hsin-Chu
- 主分类号: G03F7/20
- IPC分类号: G03F7/20 ; H05F1/00
摘要:
The present invention discloses a method for preventing electrostatic discharge damages to an article that is made of an insulating material and stored in a container also made of an insulating material by maintaining a minimum safe distance between the article and the top lid of the container such that a saturation electric field cannot be reached at such safety distance and thus electrostatic discharge does not occur. The present invention novel method can be utilized in carrying any insulating articles but is particularly suitable for carrying a quartz reticle in a polycarbonate pod.
公开/授权文献
- US5229443A Flame-retardant polycarbonate composition 公开/授权日:1993-07-20
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