Disclosed is a method for producing organic EL devices stably having intended capabilities. The method comprises cleaning an electrode-mounted substrate 17 followed by forming a plurality of film layers including organic layers and a counter electrode layer, on the electrode mounted on the substrate, successively one after another in vacuum, wherein the time just after the finish of cleaning the electrode-mounted substrate 17 and before the start of forming the first film layer on the electrode 12 is shorter than the time within which the value of the contact angle with water of the surface of the electrode 12 just after the finish of cleaning it increases by 30.degree. in vacuum. In producing organic EL devices having a plurality, n=1, 2, 3, . . . , of film layers on an electrode-mounted substrate, the time just after the finish of forming the n'th film layer and before the start of forming the next (n+1)'th film layer is shorter than the time within which the value of the contact angle with water of the surface of the n'th film layer just after having been formed increases by 30.degree. in vacuum. In the organic EL devices produced, the interfaces between the adjacent layers are protected from being contaminated with impurities.