发明授权
- 专利标题: Process for making a silicon carbide sintered body
- 专利标题(中): 制造碳化硅烧结体的方法
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申请号: US853719申请日: 1997-05-09
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公开(公告)号: US6001756A公开(公告)日: 1999-12-14
- 发明人: Yoshitomo Takahashi , Hiroaki Wada , Taro Miyamoto
- 申请人: Yoshitomo Takahashi , Hiroaki Wada , Taro Miyamoto
- 申请人地址: JPX Tokyo
- 专利权人: Bridgestone Corporation
- 当前专利权人: Bridgestone Corporation
- 当前专利权人地址: JPX Tokyo
- 优先权: JPX8-43748 19960229; JPX8-155670 19960617
- 主分类号: C04B35/575
- IPC分类号: C04B35/575 ; C04B35/569
摘要:
A silicon carbide sintered body according to the present invention is a silicon carbide sintered body having a density of 2.9 g/cm.sup.3 or higher, obtained by means of hot pressing a mixture of silicon carbide powder and a non-metal-based sintering additive such as an organic compound which produces carbon upon heating at a temperature of 2,000.degree. C. to 2,400.degree. C. and under a pressure of 300 to 700 kgf/cm.sup.2 in a non-oxidizing atmosphere. It is preferable that the silicon carbide powder have an average particle diameter of from 0.01 to 10 .mu.m and that the non-metal sintering additive be a resol type phenol resin. The present invention is to provide a silicon carbide sintered body of high quality which has a high density, a high purity, and a high electrical conductivity and which is useful for semiconductor manufacturing industry.
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