发明授权
US6002177A High density integrated circuit packaging with chip stacking and via
interconnections
失效
高密度集成电路封装,具有芯片堆叠和通孔互连
- 专利标题: High density integrated circuit packaging with chip stacking and via interconnections
- 专利标题(中): 高密度集成电路封装,具有芯片堆叠和通孔互连
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申请号: US578922申请日: 1995-12-27
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公开(公告)号: US6002177A公开(公告)日: 1999-12-14
- 发明人: Michael Anthony Gaynes , Alan James Emerick , Viswanadham Puligandla , Charles Gerard Woychik , Jerzy Maria Zalesinski
- 申请人: Michael Anthony Gaynes , Alan James Emerick , Viswanadham Puligandla , Charles Gerard Woychik , Jerzy Maria Zalesinski
- 申请人地址: NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: NY Armonk
- 主分类号: H01L23/48
- IPC分类号: H01L23/48 ; H01L25/065 ; H01L23/02
摘要:
Chip stacks with decreased conductor length and improved noise immunity are formed by laser drilling of individual chips, such as memory chips, preferably near but within the periphery thereof, and forming conductors therethrough, preferably by metallization or filling with conductive paste which may be stabilized by transient liquid phase (TLP) processes and preferably with or during metallization of conductive pads, possibly including connector patterns on both sides of at least some of the chips in the stack. At least some of the chips in the stack then have electrical and mechanical connections made therebetween, preferably with electroplated solder preforms consistent with TLP processes. The connections may be contained by a layer of resilient material surrounding the connections and which may be formed in-situ. High density circuit packages thus obtained may be mounted on a carrier by surface mount techniques or separable connectors such as a plug and socket arrangement. The carrier may be of the same material as the chip stacks to match coefficients of thermal expansion. High-density circuit packages may also be in the form of removable memory modules in generally planar or prism shaped form similar to a pen or as a thermal conduction module.
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