发明授权
- 专利标题: Electrostatic adhesion tester for thin film conductors
- 专利标题(中): 薄膜导体静电粘合试验机
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申请号: US8969申请日: 1998-01-20
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公开(公告)号: US6002259A公开(公告)日: 1999-12-14
- 发明人: Alfred J. Griffin, Jr. , Franz R. Brotzen , Daniel L. Callahan , Haining S. Yang
- 申请人: Alfred J. Griffin, Jr. , Franz R. Brotzen , Daniel L. Callahan , Haining S. Yang
- 申请人地址: TX Houston
- 专利权人: Rice University
- 当前专利权人: Rice University
- 当前专利权人地址: TX Houston
- 主分类号: G01N3/00
- IPC分类号: G01N3/00 ; G01N19/04 ; G01R27/26
摘要:
A electrostatic adhesion tester for thin film conductors. In one embodiment, a device is provided for testing the adhesion strength of a thin film conductor that has been formed upon a substrate. The device includes an adhesion tester that is primarily comprised of a conducting portion. The conducting portion is applied to the thin film conductor so that it does not physically contact the thin film conductor, but leaves a small space there between. A power supply may further be provided for coupling to either the adhesion tester, the thin film conductor, or both in order to create a potential difference between the conducting portion and the thin film conductor. The potential difference creates an electric field between the conducting portion and the thin film conductor that induces stress in the thin film conductor. A measuring device may also be provided for coupling to the adhesion tester and the thin film conductor in order to measure an electrical parameter of the electric field, which is indicative of the adhesion strength.
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